Electrically conductive silicon oxycarbide thin films prepared from preceramic polymers

This work focuses on silicon oxycarbide thin film preparation and characterization. The Taguchi method of experimental design was used to optimize the process deposition. prepared ceramic films with a thickness c. 500 nm were characterized concerning their morphology, composition, electrical properties. molecular structure preceramic polymers for as well thermomechanical properties resulting SiOC significantly influenced quality films. Thus, an increase in content carbon found beneficial crack-free obtained exhibited increased conductivity compared monolithic similar chemical composition. shown correlate unique hierarchical microstructure films, which contain large oxygen-depleted particles, mainly consisting highly graphitized SiC, homogeneously dispersed oxygen-containing amorphous matrix. matrix also free contribute charge carrier transport between conductive particles. possess conductivities range from 5.4 8.8 S/cm may be suitable implementation miniaturized piezoresistive strain gauges.